Conveying device for conveying at least one wafer

This invention describes a device that moves delicate wafers without touching them. It works by having a base with many small, adjustable magnets and a carrier for the wafer with fixed magnets. By precisely controlling the base's magnets, the device can make the wafer carrier float and move in any direction across a surface.

Why it matters: Since 2019, advancements in real-time control algorithms and more compact, powerful micro-actuators have made precise magnetic levitation systems more feasible and cost-effective. This could simplify the complex control required for levitating and moving wafers with high accuracy.

Status: Not in forceListed as no longer active. The specific reason is not in the record we hold.
How hard to build: SpecializedPrecise magnetic control, custom actuators, software logic

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