Methods and systems for process control based on X-ray inspection

This describes an X-ray system that inspects samples as they are processed by a manufacturing tool. It captures X-ray images, analyzes them in real-time to find if any sample measurements are out of range, and then instructs the manufacturing tools to adjust their settings to prevent future errors. The system is specifically designed to operate inline and inspect at least 300 square millimeters per minute.

Why it matters: AI image analysis and edge computing have advanced significantly since 2020, improving real-time metrology speed and accuracy.

Status: Not in forceListed as no longer active. The specific reason is not in the record we hold.
How hard to build: SpecializedX-ray hardware, high-speed image processing, control software

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